[Other] SRIM Simulation of Ion Beam Irradiation Effects on Oxide Thin Films

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journal:Solid State Phenomena

Authors:Chris Wilfred S. Estrada; Jeffrey D. Tare

Published date:--

DOI:10.4028/p-n82ivd

PDF link:https://www.scientific.net/SSP.352.25.pdf

Article link:http://dx.doi.org/10.4028/p-n82ivd

Article Source:Trans Tech Publications, Ltd.


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