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[Other] Determining the oxygen detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)

1158229122 Post time 3 day(s) ago | Show all posts |Read mode
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journal：Journal of Vacuum Science & Technology B

Authors：A. Merkulov

Published date：2023-7-1

DOI：10.1116/6.0002578

PDF link：https://pubs.aip.org/avs/jvb/art ... 009_1_6.0002578.pdf

Article link：http://dx.doi.org/10.1116/6.0002578

Article Source：American Vacuum Society。

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