[SPIE] Comparison of approximate methods for modelling coherence scanning interferometry

JOEY_WU Post time 3 day(s) ago | Show all posts |Read mode
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journal:Modeling Aspects in Optical Metrology IX

Authors:Helia Hooshmand-Ziafi; Tobias Pahl; Peter J. de Groot; Peter Lehmann; Athanasios Pappas; Rong Su; Richard Leach; Samanta Piano

Published date:2023-8-10

DOI:10.1117/12.2673657

Article link:http://dx.doi.org/10.1117/12.2673657

Article Source:SPIE


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