journal：2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Authors：Jie Wang; Yunfei Liu; Zhezheng Zhu; Chengchen Gao; Zhenchuan Yang; Yilong Hao
Published date：2023-1-15
DOI：10.1109/mems49605.2023.10052597
PDF link：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10052597
Article link：http://dx.doi.org/10.1109/mems49605.2023.10052597
Article Source：IEEE。
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