journal：Journal of Micromechanics and Microengineering
Authors：Zhezheng Zhu; Wangnan Chen; Lingmeng Yang; Chengchen Gao; Yilong Hao; Zhenchuan Yang
Published date：2023-8-1
DOI：10.1088/1361-6439/acda44
PDF link：https://iopscience.iop.org/article/10.1088/1361-6439/acda44
Article link：http://dx.doi.org/10.1088/1361-6439/acda44
Article Source：IOP Publishing。
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