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[Elsevier] XPS and TEM study of deposited and Ru–Si solid state reaction grown ruthenium silicides on silicon

nepia99 Post time The day before yesterday 16:46 | Show all posts |Read mode
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journal：Materials Science in Semiconductor Processing

Authors：Emil V. Jelenkovic; S. To; M.G. Blackford; O. Kutsay; Shrawan K. Jha

Published date：2015-12-

DOI：10.1016/j.mssp.2015.07.085

PDF link：https://www.sciencedirect.com/sc ... 369800115301220/pdf

Article link：http://dx.doi.org/10.1016/j.mssp.2015.07.085

Article Source：Elsevier BV。


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