Electrical properties of silicon nitride films prepared by electron cyclotron resonance assisted sputter deposition

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journal：Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Authors：K. Deenamma Vargheese; G. Mohan Rao

Published date：2001-9-1

DOI：10.1116/1.1374631

PDF link：https://pubs.aip.org/avs/jva/art ... 7/2122_1_online.pdf

Article link：http://dx.doi.org/10.1116/1.1374631

Article Source：American Vacuum Society。

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[Other] Electrical properties of silicon nitride films prepared by electron cyclotron resonance assisted sputter deposition

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