[SPIE] Progress on fabrication and metrology technology study for M3M of TMT

zj2424421285 Post time 3 day(s) ago | Show all posts |Read mode
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journal:Optical Precision Manufacturing, Testing, and Applications

Authors:Xiao Luo; Erhui Qi; Haixiang Hu; haifei hu

Published date:2018-12-12

DOI:10.1117/12.2504215

Article link:http://dx.doi.org/10.1117/12.2504215

Article Source:SPIE


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