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[IOP] Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane

Summit Post time 3 day(s) ago | Show all posts |Read mode
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journal：Journal of Micromechanics and Microengineering

Authors：Qi Wang; Zhiyong Hu; Tao Ruan; Jinshi Zhao

Published date：2024-6-1

DOI：10.1088/1361-6439/ad42a6

PDF link：https://iopscience.iop.org/article/10.1088/1361-6439/ad42a6

Article link：http://dx.doi.org/10.1088/1361-6439/ad42a6

Article Source：IOP Publishing。


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fenavi Senior Member
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