[SPIE] Development of deep ultraviolet optical maskless exposure tool for advanced lithography

Randorandy Post time 3 day(s) ago | Show all posts |Read mode
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journal:Journal of Micro/Nanopatterning, Materials, and Metrology

Authors:Yoji Watanabe; Yuho Kanaya; Yusuke Saito; Toshiaki Sakamoto; Kazuo Masaki; Soichi Owa; Thomas Koo; David Tseng; Conrad Sorensen; Bryant Lin; Michael Tan; Sujuan Li; Stephen Renwick; Noriyuki Hirayanagi; Bausan Yuan

Published date:2023-6-5

DOI:10.1117/1.jmm.22.4.041403

PDF link:https://www.spiedigitallibrary.o ... 2f1.JMM.22.4.041403

Article link:http://dx.doi.org/10.1117/1.jmm.22.4.041403

Article Source:SPIE-Intl Soc Optical Eng


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spinor Post time The day before yesterday 16:33 | Show all posts

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