[IOP] A review of interferometry for geometric measurement

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journal:Measurement Science and Technology

Authors:Shuming Yang; Guofeng Zhang

Published date:2018-10-1

DOI:10.1088/1361-6501/aad732

PDF link:http://stacks.iop.org/0957-0233/ ... 0f1bc025d5ccf703942

Article link:http://dx.doi.org/10.1088/1361-6501/aad732

Article Source:IOP Publishing


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