Quality improvement mechanism of sputtered AlN films on sapphire substrates with high-miscut-angles along different directions

Post time 5 day(s) ago

journal：CrystEngComm

Authors：Yang Yue; Maosong Sun; Xu Li; Ting Liu; Yong Lu; Jie Chen; Yi Peng; Mudassar Maraj; Jicai Zhang; Wenhong Sun

Published date：--

DOI：10.1039/d1ce00654a

PDF link：http://pubs.rsc.org/en/content/articlepdf/2021/CE/D1CE00654A

Article link：http://dx.doi.org/10.1039/d1ce00654a

Article Source：Royal Society of Chemistry (RSC)。

Remark：

Post time 5 day(s) ago

: This post has been completed
Completed attachments will be deleted within 24 hours.

Post time 5 day(s) ago

: This post has been completed
Completed attachments will be deleted within 24 hours.

[RSC] Quality improvement mechanism of sputtered AlN films on sapphire substrates with high-miscut-angles along different directions

Best Answer

Same Category

Latest Reply

Announcement

Enthusiastic users today