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[Other] Best impedance matching seeking of single-frequency capacitively coupled plasmas by numerical simulations

Golam_Zakaria Post time 2024-6-18 02:26:50 | Show all posts |Read mode
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journal：Journal of Applied Physics

Authors：Shimin Yu; Zili Chen; Hao Wu; Lianbo Guo; Zhijiang Wang; Wei Jiang; Ya Zhang

Published date：2022-8-28

DOI：10.1063/5.0096910

PDF link：https://pubs.aip.org/aip/jap/art ... 083302_1_online.pdf

Article link：http://dx.doi.org/10.1063/5.0096910

Article Source：AIP Publishing。


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Nixxiflo Senior Member
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Nixxiflo Post time 2024-6-18 02:26:51 | Show all posts

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