[SPIE] Direct patterning of functional materials using nanoimprint lithography

123HeyHo Post time 2024-6-17 21:50:30 | Show all posts |Read mode
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Edited by 123HeyHo at 2024-6-17 23:02

journal:38th European Mask and Lithography Conference (EMLC 2023)

Authors:Michael J. Haslinger; Sonja Kopp; Voktorija Jonaityte; Amiya Moharana; Helene Ausserhuber; Michael Mühlberger

Published date:2023-10-5

DOI:10.1117/12.2674052

Article link:http://dx.doi.org/10.1117/12.2674052

Article Source:SPIE


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Lexxxi Post time 2024-6-17 21:50:31 | Show all posts

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