journal:2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Authors:Kanglai Zhu; Minmin You; Yongpeng Ran; Yudong Shen; Bin Yang; Jingquan Liu
Published date:2024-1-21
DOI:10.1109/mems58180.2024.10439551
PDF link:https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10439551
Article link:http://dx.doi.org/10.1109/mems58180.2024.10439551
Article Source:IEEE。
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