[RSC] Amorphous AlN films grown by ALD from trimethylaluminum and monomethylhydrazine

pu3aisyah Post time 2024-6-15 10:42:52 | Show all posts |Read mode
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journal:Dalton Transactions

Authors:Roman G. Parkhomenko; Oreste De Luca; Lukasz Kolodziejczyk; Evgeny Modin; Petra Rudolf; Diego Martínez Martínez; Luis Cunha; Mato Knez

Published date:--

DOI:10.1039/d1dt02529e

PDF link:http://pubs.rsc.org/en/content/articlepdf/2021/DT/D1DT02529E

Article link:http://dx.doi.org/10.1039/d1dt02529e

Article Source:Royal Society of Chemistry (RSC)

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Georgee Post time 2024-6-15 10:42:53 | Show all posts

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