[SPIE] Optimal etch recipe prediction for 3D NAND structures

sjm356 Post time 2022-5-13 15:17:41 | Show all posts |Read mode
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journal:Advanced Etch Technology for Nanopatterning IX

Authors:Leandro Medina; Bryan Sundahl; Meghali Chopra; Roger T. Bonnecaze

Published date:2020-3-23

DOI:10.1117/12.2552121

Article link:http://dx.doi.org/10.1117/12.2552121

Article Source:SPIE


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Book1man Post time 2022-5-13 15:17:42 | Show all posts

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