[SPIE] Fast etch recipe creation with automated model-based process optimization

sjm356 Post time 2022-5-13 14:37:00 | Show all posts |Read mode
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journal:Advanced Etch Technology and Process Integration for Nanopatterning X

Authors:Yang Ban; Kara Kearney; Bryan Sundahl; Leandro Medina; Roger T. Bonnecaze; Meghali J. Chopra

Published date:2021-2-22

DOI:10.1117/12.2583868

Article link:http://dx.doi.org/10.1117/12.2583868

Article Source:SPIE


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enujoachim Post time 2022-5-13 14:37:01 | Show all posts

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