journal:Journal of Micromechanics and Microengineering
Authors:Dik Son Cheah; Yousif Saad Alshebly; Mohamed Sultan Mohamed Ali; Marwan Nafea
Published date:2022-6-1
DOI:10.1088/1361-6439/ac68ca
Article link:http://dx.doi.org/10.1088/1361-6439/ac68ca
Article Source:IOP Publishing。
Remark:I need the published version not the accepted version. |