[IEEE] Miniaturized Ruthenium Oxide Cryogenic Temperature Sensor Based on MEMS Technology

to0869 Post time 2024-6-17 14:23:07 | Show all posts |Read mode
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journal:2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

Authors:Kanglai Zhu; Minmin You; Yongpeng Ran; Yudong Shen; Bin Yang; Jingquan Liu

Published date:2024-1-21

DOI:10.1109/mems58180.2024.10439551

PDF link:https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10439551

Article link:http://dx.doi.org/10.1109/mems58180.2024.10439551

Article Source:IEEE


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