Fabrication of a freestanding AlN substrate via HVPE homoepitaxy on a PVT-AlN substrate

Post time 2024-6-17 11:13:37

journal：Semiconductor Science and Technology

Authors：Ting Liu; Qian Zhang; Xu Li; Minghao Chen; Chunhua Du; Maosong Sun; Jia Wang; Shuxin Tan; Jicai Zhang

Published date：2024-1-1

DOI：10.1088/1361-6641/ad12df

PDF link：https://iopscience.iop.org/article/10.1088/1361-6641/ad12df

Article link：http://dx.doi.org/10.1088/1361-6641/ad12df

Article Source：IOP Publishing。

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Post time 2024-6-17 11:13:38

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[IOP] Fabrication of a freestanding AlN substrate via HVPE homoepitaxy on a PVT-AlN substrate